Here, we demonstrate an integrated, microresonator-based, narrowband photon-pair source. The integrated microresonator, made of silicon nitride and fabricated using a standard CMOS foundry process, features ultralow loss down to 0.03 dB/cm and intrinsic 𝑄 factor exceeding 10^7. The photon-pair source has brightness of 1.17×10^9 Hz/mW^2/GHz and linewidth of 25.9 MHz, both of which are record values for silicon-photonics-based quantum light source.
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